Open AccessA SINGLE-CRYSTAL SILICON RESONATOR FOR AM DEMODULATION WITH ADDED SECOND-HARMONIC MODULATION
Author(s) -
Mary E. Galanko,
Yi-Chung Lin,
Tamal Mukherjee,
Gary K. Fedder
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.97
Subject(s) - demodulation , resonator , silicon , modulation (music) , materials science , optoelectronics , harmonic , frequency modulation , electronic engineering , radio frequency , telecommunications , acoustics , computer science , physics , engineering , channel (broadcasting)