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TWO-CHANNEL WAKEUP SYSTEM EMPLOYING ALUMINUM NITRIDE BASED MEMS RESONANT ACCELEROMETERS FOR NEAR-ZERO POWER APPLICATIONS
Author(s) -
Robert Reger,
Sean Yen,
Bryson Barney,
Michael Randolph Satches,
Andrew Ian Young,
Tammy Pluym,
Michael Wiwi,
Matthew A. Delaney,
Ben Griffin
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Danish
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.95
Subject(s) - accelerometer , microelectromechanical systems , electrical engineering , signal (programming language) , power (physics) , mechanical resonance , rlc circuit , materials science , electronic engineering , computer science , vibration , optoelectronics , acoustics , engineering , physics , capacitor , voltage , quantum mechanics , operating system , programming language

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