Open AccessTWO-CHANNEL WAKEUP SYSTEM EMPLOYING ALUMINUM NITRIDE BASED MEMS RESONANT ACCELEROMETERS FOR NEAR-ZERO POWER APPLICATIONS
Author(s) -
Robert Reger,
Sean Yen,
Bryson Barney,
Michael Randolph Satches,
Andrew Ian Young,
Tammy Pluym,
Michael Wiwi,
Matthew A. Delaney,
Benjamin A. Griffin
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Danish
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.95
Subject(s) - microelectromechanical systems , accelerometer , materials science , nitride , power (physics) , channel (broadcasting) , zero (linguistics) , optoelectronics , computer science , electrical engineering , nanotechnology , physics , engineering , layer (electronics) , linguistics , philosophy , quantum mechanics , operating system