Open AccessCAPACITIVE TRANSDUCER ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE OF YAW RATE GYROSCOPE
Author(s) -
Pai Shao,
E. Canales,
Pei Zhu
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.91
Subject(s) - capacitive sensing , gyroscope , transducer , acoustics , compensation (psychology) , electrode , materials science , capacitive micromachined ultrasonic transducers , quadrature (astronomy) , electrical engineering , optoelectronics , physics , engineering , aerospace engineering , psychology , quantum mechanics , psychoanalysis