Open AccessCMOS COMPATIBLE GHZ ULTRASONIC FRESNEL MICROFLUIDIC ACTUATOR
Author(s) -
A. Ravi,
Justin Kuo,
Amit Lal
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.88
Subject(s) - actuator , microfluidics , ultrasonic sensor , cmos , materials science , optoelectronics , electrical engineering , acoustics , engineering , physics , nanotechnology