Open AccessCMOS COMPATIBLE GHZ ULTRASONIC FRESNEL MICROFLUIDIC ACTUATOR
Author(s) -
A. Ravi,
Justin Kuo,
Amit Lal
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.88
Subject(s) - transducer , materials science , actuator , acoustic streaming , microfluidics , ultrasonic sensor , acoustics , capacitive micromachined ultrasonic transducers , lens (geology) , optics , optoelectronics , electrical engineering , engineering , physics , nanotechnology
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