Open AccessMULTILAYER ALD CERAMIC FILMS FOR ENHANCEMENT OF PARYLENE BARRIER PROPERTIES IN COMPLIANT NEURAL PROBES WITH BONDED CHIPS
Author(s) -
Mats Forssell,
Xiao Chuan Ong,
Gary K. Fedder
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.78
Subject(s) - parylene , materials science , ceramic , brain implant , nanotechnology , optoelectronics , composite material , biomedical engineering , polymer , engineering