Open AccessHOLLOW FLEXURAL RESONATORS WITH NANOSCALE THICKNESS
Author(s) -
Wujoon Cha,
Samuel M. Nicaise,
Drew Lilley,
Cheng-Jung Lin,
Igor Bargatin
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.66
Subject(s) - resonator , nanoscopic scale , materials science , flexural strength , optoelectronics , composite material , nanotechnology