Open AccessHOLLOW FLEXURAL RESONATORS WITH NANOSCALE THICKNESS
Author(s) -
Wujoon Cha,
Samuel M. Nicaise,
Drew Lilley,
Lin Chen,
Igor Bargatin
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.66
Subject(s) - resonator , materials science , cantilever , bandwidth (computing) , optoelectronics , silicon , spring (device) , q factor , nanoscopic scale , resonance (particle physics) , etching (microfabrication) , layer (electronics) , nanotechnology , composite material , computer science , structural engineering , computer network , physics , particle physics , engineering
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