Open Access2D AND 3D DOPING OF SILICON MEMS STRUCTURES USING PHOSPHORUS-DOPED POLYSILICON AS A DOPANT SOURCE
Author(s) -
Pascal Newby,
Kazem Zandi,
K. Cute,
J. Richard,
Khaled Belarbi
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.34
Subject(s) - doping , dopant , materials science , silicon , microelectromechanical systems , optoelectronics , phosphorus , engineering physics , metallurgy , engineering