Open Access2D AND 3D DOPING OF SILICON MEMS STRUCTURES USING PHOSPHORUS-DOPED POLYSILICON AS A DOPANT SOURCE
Author(s) -
Pascal Newby,
Kazem Zandi,
K. Cute,
J. Richard,
Khaled Belarbi
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.34
Subject(s) - doping , wafer , materials science , dopant , silicon , optoelectronics , chemical vapor deposition , microelectromechanical systems , silicon on insulator , nanotechnology
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