Open AccessA SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY
Author(s) -
Yiliang Bao,
Feng Zhou,
Thomas W. LeBrun,
Jason J. Gorman
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.103
Subject(s) - accelerometer , bandwidth (computing) , sensitivity (control systems) , silicon , computer science , optoelectronics , electronic engineering , physics , telecommunications , engineering , operating system