Open AccessA SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY
Author(s) -
Yiliang Bao,
Feng Zhou,
Thomas W. LeBrun,
Jason J. Gorman
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.103
Subject(s) - accelerometer , bandwidth (computing) , sensitivity (control systems) , vibration , aerospace , acoustics , computer science , electronic engineering , physics , optics , aerospace engineering , engineering , telecommunications , operating system
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