Open AccessPRECISE LOCAL TEMPERATURE MEASUREMENT OF FULLY ENCAPSULATED OVENIZED MEMS DEVICES
Author(s) -
Hee-jun Kwon,
David B. Heinz,
Dongsuk D. Shin,
Y. Chen,
Lizmarie Comenencia Ortiz,
Gabrielle D. Vukasin,
Tom Kenny
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.100
Subject(s) - temperature measurement , microelectromechanical systems , materials science , temperature control , optoelectronics , length measurement , electronic engineering , acoustics , optics , mechanical engineering , engineering , physics , quantum mechanics
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