Open AccessPRECISE LOCAL TEMPERATURE MEASUREMENT OF FULLY ENCAPSULATED OVENIZED MEMS DEVICES
Author(s) -
Hee-jun Kwon,
David B. Heinz,
Dongsuk D. Shin,
Y. Chen,
Lizmarie Comenencia Ortiz,
Gabrielle D. Vukasin,
Tom Kenny
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.100
Subject(s) - microelectromechanical systems , temperature measurement , materials science , optoelectronics , computer science , physics , thermodynamics