Open AccessENABLING THE NEXT GENERATION OF MEMS TECHNOLOGY
Author(s) -
William J. Chappell
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.1
Subject(s) - microelectromechanical systems , computer science , materials science , optoelectronics