Open AccessMICROFABRICATED THERMAL PRE-CONCENTRATOR WITH INTEGRATED CANTILEVER-BASED RESONANT SENSORS
Author(s) -
C. Carron,
Patrick Getz,
Milad Navaei,
Gary McMurray,
Oliver Brand
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.99
Subject(s) - cantilever , concentrator , thermal , materials science , microfabrication , optoelectronics , electrical engineering , acoustics , engineering , physics , composite material , fabrication , meteorology , medicine , alternative medicine , pathology