Open AccessMICROFABRICATED THERMAL PRE-CONCENTRATOR WITH INTEGRATED CANTILEVER-BASED RESONANT SENSORS
Author(s) -
C. Carron,
Patrick Getz,
Milad Navaei,
Gary McMurray,
Oliver Brand
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.99
Subject(s) - cantilever , thermal , microelectromechanical systems , fabrication , materials science , concentrator , volume (thermodynamics) , optoelectronics , thermal mass , upstream (networking) , electrical engineering , computer science , engineering , composite material , physics , medicine , alternative medicine , pathology , meteorology , computer network , quantum mechanics
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