Open AccessMEMS AIR-MICROFLUIDIC LAB-ON-A-CHIP SENSOR FOR PERSONAL MONITORING OF AIRBORNE PARTICULATE MATTER
Author(s) -
Dorsa Fahimi,
Omid Mahdavipour,
T. Cados,
Thomas W. Kirchstetter,
Paul A. Solomon,
Lara A. Gundel,
R.M. White,
Naoki Fukushima,
Hidenori Nagai,
M. Saitoh,
Igor Paprotny
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.91
Subject(s) - particulates , microelectromechanical systems , fabrication , microfluidics , materials science , sensitivity (control systems) , chip , mass concentration (chemistry) , resonator , optoelectronics , nanotechnology , electronic engineering , electrical engineering , engineering , chemistry , organic chemistry , medicine , alternative medicine , pathology
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