Open AccessPARYLENE ENCAPSULATED SUB-MICRON STRUCTURES FOR IMPLANTABLE BIOMEMS
Author(s) -
Kee Scholten,
Ellis Meng
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.84
Subject(s) - parylene , materials science , nanotechnology , polymer , composite material