Open AccessPARYLENE ENCAPSULATED SUB-MICRON STRUCTURES FOR IMPLANTABLE BIOMEMS
Author(s) -
Kee Scholten,
Ellis Meng
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.84
Subject(s) - parylene , materials science , electron beam lithography , lithography , nanotechnology , photolithography , resist , silicon , optoelectronics , nanoscopic scale , fabrication , shadow mask , polymer , nanolithography , optics , composite material , medicine , alternative medicine , physics , layer (electronics) , pathology
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