PIEZOELECTRIC MEMS MICROPHONES NOISE SOURCES
Author(s) -
Robert Littrell,
R. Gag
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.69
Subject(s) - microelectromechanical systems , capacitive sensing , acoustics , piezoelectricity , noise (video) , pmut , materials science , electronic engineering , electrical engineering , computer science , engineering , optoelectronics , physics , artificial intelligence , image (mathematics)
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