Open AccessLITHOGRAPHY FREE SELF-RECONFIGURABLE POST-RELEASE STRESS-ENGINEERING FOR FIELD-PROGRAMMABLE MICROSTRESSBOTS
Author(s) -
R. K. Majumdar,
Igor Paprotny
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.67
Subject(s) - lithography , stress (linguistics) , computer science , materials science , embedded system , optoelectronics , linguistics , philosophy