Open AccessLITHOGRAPHY FREE SELF-RECONFIGURABLE POST-RELEASE STRESS-ENGINEERING FOR FIELD-PROGRAMMABLE MICROSTRESSBOTS
Author(s) -
Ratul Majumdar,
Igor Paprotny
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.67
Subject(s) - surface micromachining , materials science , photolithography , control reconfiguration , actuator , shadow mask , lithography , stress (linguistics) , fabrication , layer (electronics) , nanotechnology , computer science , engineering , optoelectronics , embedded system , electrical engineering , linguistics , philosophy , medicine , alternative medicine , computer graphics (images) , pathology
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