Open AccessHIGH-SPEED, LARGE SCAN AREA, DISTORTION-FREE OPERATION OF SINGLE-CHIP ATOMIC FORCE MICROSCOPES
Author(s) -
G. Lee,
Niladri Sarkar,
D. Strathearn,
M. Olfat,
Aradhana Bali,
Raafat R. Mansour
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.66
Subject(s) - chip , distortion (music) , microscope , optics , materials science , computer science , optoelectronics , physics , cmos , telecommunications , amplifier