Open AccessHIGH-SPEED, LARGE SCAN AREA, DISTORTION-FREE OPERATION OF SINGLE-CHIP ATOMIC FORCE MICROSCOPES
Author(s) -
G. Lee,
Niladri Sarkar,
D. Strathearn,
M. Olfat,
Aradhana Bali,
Raafat R. Mansour
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.66
Subject(s) - cantilever , chip , atomic force microscopy , materials science , actuator , static random access memory , distortion (music) , bandwidth (computing) , dynamic range , microscope , optoelectronics , optics , nanotechnology , physics , computer science , electrical engineering , cmos , computer hardware , engineering , amplifier , computer network , composite material
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