Open AccessDEVELOPMENT OF A HYDRAULICALLY SMOOTH WALL SHEAR STRESS SENSOR UTILIZING THROUGH SILICON VIAS
Author(s) -
Casey Barnard,
David Mills,
Jessica Meloy,
Mark Sheplak
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.63
Subject(s) - shear stress , materials science , silicon , stress (linguistics) , shear (geology) , composite material , optoelectronics , linguistics , philosophy