Open AccessDEVELOPMENT OF A HYDRAULICALLY SMOOTH WALL SHEAR STRESS SENSOR UTILIZING THROUGH SILICON VIAS
Author(s) -
Casey Barnard,
David A. Mills,
Jessica Meloy,
Mark Sheplak
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.63
Subject(s) - materials science , microelectromechanical systems , silicon , shear stress , pressure sensor , modular design , acoustics , aerodynamics , stress (linguistics) , shear (geology) , sensitivity (control systems) , optoelectronics , electronic engineering , composite material , engineering , mechanical engineering , computer science , aerospace engineering , linguistics , philosophy , physics , operating system
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