Open AccessDYNAMIC CHARACTERIZATION OF IN-PLANE BULK ACOUSTIC RESONATORS USING HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS
Author(s) -
Vikrant J. Gokhale,
Jason J. Gorman
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.41
Subject(s) - resonator , characterization (materials science) , sensitivity (control systems) , reflection (computer programming) , materials science , optics , acoustics , optoelectronics , computer science , physics , electronic engineering , engineering , nanotechnology , programming language