Open AccessDYNAMIC CHARACTERIZATION OF IN-PLANE BULK ACOUSTIC RESONATORS USING HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS
Author(s) -
Vikrant J. Gokhale,
Jason J. Gorman
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.41
Subject(s) - resonator , materials science , optics , sensitivity (control systems) , microelectromechanical systems , displacement (psychology) , acoustics , vibration , reflection (computer programming) , silicon , acoustic wave , resonance (particle physics) , characterization (materials science) , optoelectronics , physics , electronic engineering , computer science , engineering , programming language , psychology , particle physics , psychotherapist
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