Open AccessHIGH-ASPECT RATIO MICROSTRUCTURES IN BOROSILICATE GLASS BY MOLDING AND SACRIFICIAL SILICON ETCHING: CAPABILITIES AND LIMITS
Author(s) -
Amrid Amnache,
Luc G. Fréchette
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.40
Subject(s) - borosilicate glass , materials science , microfabrication , aspect ratio (aeronautics) , molding (decorative) , etching (microfabrication) , silicon , composite material , microstructure , optics , optoelectronics , fabrication , layer (electronics) , medicine , alternative medicine , physics , pathology
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