Open AccessHIGH-ASPECT RATIO MICROSTRUCTURES IN BOROSILICATE GLASS BY MOLDING AND SACRIFICIAL SILICON ETCHING: CAPABILITIES AND LIMITS
Author(s) -
Amrid Amnache,
Luc Fréchette
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.40
Subject(s) - borosilicate glass , materials science , etching (microfabrication) , silicon , microstructure , aspect ratio (aeronautics) , molding (decorative) , composite material , metallurgy , layer (electronics)