Open AccessAUTONOMOUS OSCILLATIONS WITHOUT EXTERNAL POWER SUPPLY IN A MEMS OSCILLATOR THROUGH INTERNAL RESONANT MODE COUPLING
Author(s) -
C. Chen,
Damián H. Zanette,
David A. Czaplewski,
D. López
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.4
Subject(s) - coupling (piping) , mode (computer interface) , power (physics) , microelectromechanical systems , physics , optoelectronics , engineering , computer science , quantum mechanics , mechanical engineering , operating system