Open AccessATOMIC LAYER ETCHING OF SUSPENDED ULTRA-THIN STRUCTURES
Author(s) -
Nathan T. Eigenfeld,
Jonas C. Gertsch,
George D. Skidmore,
Steve George,
Victor M. Bright
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.39
Subject(s) - etching (microfabrication) , layer (electronics) , materials science , atomic layer deposition , optoelectronics , nanotechnology