Open AccessATOMIC LAYER ETCHING OF SUSPENDED ULTRA-THIN STRUCTURES
Author(s) -
Nathan T. Eigenfeld,
Jonas C. Gertsch,
George D. Skidmore,
Steven M. George,
Victor M. Bright
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.39
Subject(s) - atomic layer deposition , etching (microfabrication) , materials science , polyimide , layer (electronics) , fabrication , thermal , microbolometer , optoelectronics , deposition (geology) , thin film , nanotechnology , bolometer , optics , medicine , paleontology , alternative medicine , physics , pathology , sediment , detector , meteorology , biology
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