Open AccessRESONANT PIEZOELECTRIC CANTILEVERS AS NANO-PRECISION DISPLACEMENT PROBES
Author(s) -
Mohammad Mahdavi,
Amin Abbasalipour,
A.J. Moses,
Siavash Pourkamali
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.34
Subject(s) - cantilever , materials science , resonator , piezoelectricity , optoelectronics , optics , non contact atomic force microscopy , displacement (psychology) , silicon , interferometry , atomic force microscopy , nanotechnology , kelvin probe force microscope , physics , composite material , psychology , psychotherapist
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