Open AccessRESONANT PIEZOELECTRIC CANTILEVERS AS NANO-PRECISION DISPLACEMENT PROBES
Author(s) -
Mohammad Mahdavi,
Amin Abbasalipour,
Anthony John Moses,
Siavash Pourkamali
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.34
Subject(s) - cantilever , nano , piezoelectricity , displacement (psychology) , materials science , acoustics , optoelectronics , nanotechnology , physics , composite material , psychology , psychotherapist