Open AccessELECTRICAL AND OPTICAL TRANSDUCTION OF SINGLE-CRYSTAL 3C-SIC COMB-DRIVE RESONATORS IN A SIC-ON-INSULATOR (SiCOI) TECHNOLOGY
Author(s) -
Jonathan P. McCandless,
J. Lee,
Hung-I Kuo,
Vida Pashaei,
Mehran Mehregany,
C.A. Zorman,
Philip X.L. Feng
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.3
Subject(s) - optoelectronics , resonator , materials science , silicon on insulator , insulator (electricity) , comb drive , electrical engineering , engineering , fabrication , silicon , medicine , alternative medicine , pathology