Open AccessELECTRICAL AND OPTICAL TRANSDUCTION OF SINGLE-CRYSTAL 3C-SIC COMB-DRIVE RESONATORS IN A SIC-ON-INSULATOR (SiCOI) TECHNOLOGY
Author(s) -
Jonathan P. McCandless,
J. Lee,
H.-I. Kuo,
Vida Pashaei,
Mehran Mehregany,
Christian A. Zorman,
Philip X.L. Feng
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.3
Subject(s) - materials science , resonator , optoelectronics , capacitive sensing , comb drive , transduction (biophysics) , electrical engineering , fabrication , chemistry , engineering , medicine , alternative medicine , pathology , biochemistry
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