Open AccessCOMBINING SOFT LITHOGRAPHY AND PHOTO-POLYMERIZATION FOR ENGINEERED MICRO-ENVIRONMENT
Author(s) -
Zhiqiang Ge,
Creighton Buie
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.15
Subject(s) - lithography , soft lithography , materials science , polymerization , photolithography , nanotechnology , polymer , optoelectronics , composite material , fabrication , medicine , alternative medicine , pathology