Open AccessCOMBINING SOFT LITHOGRAPHY AND PHOTO-POLYMERIZATION FOR ENGINEERED MICRO-ENVIRONMENT
Author(s) -
Zhiqiang Ge,
Cullen Buie
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.15
Subject(s) - lithography , photopolymer , soft lithography , polymerization , nanotechnology , self healing hydrogels , natural (archaeology) , materials science , photolithography , biochemical engineering , computer science , polymer , engineering , optoelectronics , composite material , polymer chemistry , fabrication , geology , medicine , alternative medicine , pathology , paleontology
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