Open AccessA MEMS BASED METHOD TO FABRICATE A MICRO PRESSURE SWIRL ATOMIZER AND ITS PERFORMANCE
Author(s) -
Durai Kumaran,
David Gaddes,
Eugene Freeman,
Srinivas Tadigadapa,
Mahesh V. Panchagnula
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.126
Subject(s) - microelectromechanical systems , materials science , pressure sensor , mechanical engineering , computer science , optoelectronics , engineering