Open AccessA PRELIMINARY STUDY OF AN ELECTROSTATIC CURVED BEAM ACTUATOR FOR A BIO-MEMS FORCE SENSOR
Author(s) -
B. S. Preetham,
Melinda Lake,
David J. Hoelzle
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.121
Subject(s) - microactuator , microelectromechanical systems , actuator , microfluidics , beam (structure) , materials science , displacement (psychology) , voltage , deformation (meteorology) , mechanical engineering , nanotechnology , structural engineering , electrical engineering , composite material , engineering , psychology , psychotherapist
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