Open AccessTHE EFFECT OF CRYSTALLINE ORIENTATION ON VIBRATION SENSITIVITY OF SILICON MICRO-RESONATORS
Author(s) -
Beheshte Khazaeili,
Reza Abdolvand
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.119
Subject(s) - resonator , sensitivity (control systems) , materials science , silicon , vibration , orientation (vector space) , optoelectronics , acoustics , electronic engineering , engineering , physics , geometry , mathematics