Open AccessTHE EFFECT OF CRYSTALLINE ORIENTATION ON VIBRATION SENSITIVITY OF SILICON MICRO-RESONATORS
Author(s) -
Beheshte Khazaeili,
Reza Abdolvand
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.119
Subject(s) - resonator , silicon , materials science , wafer , acceleration , microelectromechanical systems , optoelectronics , vibration , sensitivity (control systems) , substrate (aquarium) , electronic engineering , acoustics , physics , engineering , oceanography , classical mechanics , geology
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