Open AccessSYSTEMATIC DESIGN OF MEMS RESONATORS FOR OPTIMAL NONLINEAR DYNAMIC RESPONSE
Author(s) -
L.L. Li,
Pavel Polunin,
Suguang Dou,
Oriel Shoshani,
B. Scott Strachan,
Jakob S. Jensen,
Steven W. Shaw,
Kimberly L. Turner
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.118
Subject(s) - resonator , microelectromechanical systems , nonlinear system , stiffness , vibration , materials science , control theory (sociology) , acoustics , duffing equation , physics , computer science , optoelectronics , control (management) , quantum mechanics , artificial intelligence , composite material
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