Open AccessSYSTEMATIC DESIGN OF MEMS RESONATORS FOR OPTIMAL NONLINEAR DYNAMIC RESPONSE
Author(s) -
L.L. Li,
Pavel M. Polunin,
Suguang Dou,
Oriel Shoshani,
B. Scott Strachan,
Jakob Søndergaard Jensen,
Steven W. Shaw,
Kimberly L. Turner
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.118
Subject(s) - microelectromechanical systems , resonator , nonlinear system , computer science , electronic engineering , control theory (sociology) , materials science , engineering , optoelectronics , physics , control (management) , quantum mechanics , artificial intelligence