Open AccessHIGH SENSITIVITY BIDIRECTIONAL PRESSURE SENSOR BASED ON FORCE FREQUENCY EFFECT IN MICROMACHINED AT-CUT QUARTZ RESONATORS
Author(s) -
N. Goel,
Srinivas Tadigadapa,
Stephen F. Bart
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.113
Subject(s) - torr , resonator , materials science , quartz , surface micromachining , sensitivity (control systems) , diaphragm (acoustics) , pressure sensor , acoustics , signal (programming language) , bulk micromachining , optoelectronics , pressure measurement , fabrication , electronic engineering , vibration , engineering , composite material , physics , computer science , medicine , mechanical engineering , alternative medicine , pathology , thermodynamics , programming language
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