Open AccessHIGH SENSITIVITY BIDIRECTIONAL PRESSURE SENSOR BASED ON FORCE FREQUENCY EFFECT IN MICROMACHINED AT-CUT QUARTZ RESONATORS
Author(s) -
Nishit Goel,
Srinivas Tadigadapa,
Stephen F. Bart
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.113
Subject(s) - resonator , sensitivity (control systems) , materials science , pressure sensor , quartz , acoustics , surface micromachining , optoelectronics , electronic engineering , fabrication , engineering , physics , composite material , mechanical engineering , medicine , alternative medicine , pathology