Open Access920 MHZ ALUMINUM NITRIDE CROSS-SECTIONAL LAMÉ MODE PIEZOELECTRIC MEMS TRANSFORMER WITH HIGH OPEN-CIRCUIT VOLTAGE GAIN IN EXCESS OF 39
Author(s) -
Cristian Cassella,
Guofeng Chen,
Zhenyun Qian,
Gwendolyn Hummel,
Matteo Rinaldi
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.110
Subject(s) - transformer , materials science , miniaturization , piezoelectricity , voltage , resonator , microelectromechanical systems , electrical engineering , optoelectronics , nitride , electrode , acoustics , engineering , composite material , physics , layer (electronics) , quantum mechanics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom