Open Access920 MHZ ALUMINUM NITRIDE CROSS-SECTIONAL LAMÉ MODE PIEZOELECTRIC MEMS TRANSFORMER WITH HIGH OPEN-CIRCUIT VOLTAGE GAIN IN EXCESS OF 39
Author(s) -
Cristian Cassella,
Guofeng Chen,
Zhenyun Qian,
Gwendolyn Hummel,
Matteo Rinaldi
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.110
Subject(s) - materials science , piezoelectricity , optoelectronics , nitride , voltage , transformer , open circuit voltage , electrical engineering , microelectromechanical systems , aluminium , engineering , composite material , layer (electronics)