Open Access130 SECOND RING-DOWN TIME AND 3.98 MILLION QUALITY FACTOR IN 10 KHZ FUSED SILICA MICRO BIRDBATH SHELL RESONATOR
Author(s) -
Tal Nagourney,
J.Y. Cho,
Ali Darvishian,
Behrouz Shiari,
K. Najafi
Publication year - 2016
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.109
Subject(s) - resonator , radius , gyroscope , materials science , quality (philosophy) , optics , microelectromechanical systems , shell (structure) , q factor , ring (chemistry) , optoelectronics , physics , composite material , chemistry , organic chemistry , quantum mechanics , computer security , computer science
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