Open AccessHIGH HEAT FLUX EVAPORATIVE NANOPOROUS SILICON MEMBRANE DEVICE FOR ADVANCED THERMAL MANAGEMENT
Author(s) -
Daniel F. Hanks,
Jay Sircar,
Zhengmao Lu,
Dion S. Antao,
Kevin R. Bagnall,
Banafsheh Barabadi,
Todd Salamon,
E.N. Wang
Publication year - 2016
Publication title -
2016 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2016.102
Subject(s) - silicon , thermal management of electronic devices and systems , materials science , heat flux , flux (metallurgy) , thermal , membrane , nanoporous , evaporative cooler , environmental science , optoelectronics , heat transfer , nanotechnology , mechanics , thermodynamics , chemistry , mechanical engineering , engineering , physics , metallurgy , biochemistry