Open AccessNOVEL AMORPHOUS METAL THIN FILMS FOR MEMS APPLICATIONS
Author(s) -
James E. Abbott,
John M. McGlone,
Kristopher R. Olsen,
Greg S. Long,
Roberto A. Pugliese,
Akshay Agarwal,
John F. Wager,
Douglas A. Keszler,
J. Wooden,
Brian E. Bolf,
Peter Krause,
T. Berdahl,
William F. Stickle,
Martin D. Johnson,
and P. Eschback
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.93
Subject(s) - microelectromechanical systems , materials science , thin film , amorphous solid , amorphous metal , nanotechnology , vacuum deposition , electronics , optoelectronics , composite material , electrical engineering , engineering , chemistry , organic chemistry , alloy