Open AccessNOVEL AMORPHOUS METAL THIN FILMS FOR MEMS APPLICATIONS
Author(s) -
James E. Abbott,
John M. McGlone,
Kristopher R. Olsen,
Greg S. Long,
Roberto A. Pugliese,
Akshay Agarwal,
John F. Wager,
Douglas A. Keszler,
J. Wooden,
Brian E. Bolf,
Peter Krause,
T. Berdahl,
William F. Stickle,
Martin D. Johnson,
and P. Eschback
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.93
Subject(s) - microelectromechanical systems , amorphous solid , materials science , thin film , metal , optoelectronics , nanotechnology , computer science , metallurgy , chemistry , crystallography