Open AccessEXPERIMENTAL VALIDATION OF 3D INTUITIVE MODELING APPROACH FOR ANCHOR LOSS IN MEMS RESONATORS
Author(s) -
Jonathan James Lake,
Young-Suk Hwang,
Eldwin J. Ng,
Vu A. Hong,
Yintang Yang,
Yuanshun Dai,
Rob N. Candler,
Chang-Nam Ahn
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.74
Subject(s) - microelectromechanical systems , computer science , resonator , solid modeling , electronic engineering , materials science , engineering , artificial intelligence , electrical engineering , optoelectronics