Open AccessEXPERIMENTAL VALIDATION OF 3D INTUITIVE MODELING APPROACH FOR ANCHOR LOSS IN MEMS RESONATORS
Author(s) -
Jonathan Lake,
Yongha Hwang,
E. Ng,
Vu A. Hong,
Yintang Yang,
Yangyong Dai,
Rob N. Candler,
Chang-Nam Ahn
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.74
Subject(s) - resonator , microelectromechanical systems , computer science , range (aeronautics) , electronic engineering , key (lock) , engineering , materials science , electrical engineering , aerospace engineering , optoelectronics , computer security
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