Open AccessDIAMOND HEMISPHERICAL RESONATOR FABRICATION BY ISOTROPIC GLASS ETCH
Author(s) -
J. Bernstein,
Mirela G. Bancu,
Eugene H. Cook,
Tania Henry,
Peter Kwok,
Tenzin Nyinjee,
Gayatri E. Perlin,
B. Teynor,
Marc S. Weinberg
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.73
Subject(s) - fabrication , diamond , materials science , resonator , isotropy , optoelectronics , optics , composite material , physics , medicine , alternative medicine , pathology