Open AccessDIAMOND HEMISPHERICAL RESONATOR FABRICATION BY ISOTROPIC GLASS ETCH
Author(s) -
Jonathan Bernstein,
Mirela G. Bancu,
Eugene H. Cook,
T. A. Henry,
Peter Kwok,
Tenzin Nyinjee,
Gayatri E. Perlin,
B. Teynor,
Marc S. Weinberg
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.73
Subject(s) - materials science , resonator , diamond , fabrication , optoelectronics , optics , substrate (aquarium) , composite material , physics , medicine , alternative medicine , pathology , oceanography , geology
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