Open AccessMICROFABRICATED BULK PZT PIEZOELECTRIC DISK TRANSFORMERS
Author(s) -
M. Mirzaeimghri,
Prakruthi Hareesh,
Isaac Misri,
Don L. DeVoe
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.70
Subject(s) - microfabrication , piezoelectricity , materials science , transformer , voltage , resonator , electrical impedance , vibration , acoustics , optoelectronics , electrical engineering , electronic engineering , engineering , composite material , physics , fabrication , medicine , alternative medicine , pathology
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