Open AccessMICROSYSTEM FOR PARTICLE COUNTING AND SIZING WITH TUNABLE SENSITIVITY AND THROUGHPUT
Author(s) -
Thomas Winkler,
Hadar BenYoav,
Deanna L. Kelly,
Reza Ghodssi
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.67
Subject(s) - microsystem , sizing , throughput , sensitivity (control systems) , particle (ecology) , computer science , nanotechnology , materials science , electronic engineering , engineering , chemistry , telecommunications , oceanography , organic chemistry , geology , wireless