Open AccessMICROSYSTEM FOR PARTICLE COUNTING AND SIZING WITH TUNABLE SENSITIVITY AND THROUGHPUT
Author(s) -
Thomas E. Winkler,
Hadar BenYoav,
Deanna L. Kelly,
Reza Ghodssi
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.67
Subject(s) - microsystem , sizing , sensitivity (control systems) , microfluidics , throughput , electrical impedance , coupling (piping) , computer science , electronic engineering , nanotechnology , fabrication , materials science , lab on a chip , electrical engineering , engineering , wireless , telecommunications , chemistry , organic chemistry , medicine , alternative medicine , pathology , metallurgy
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