Open AccessA SINGLE-MEMBRANE PERMEATION-BASED SENSOR CONCEPT FOR THE MEASUREMENT OF MULTIPLE GASES
Author(s) -
Silvan Schwebke,
Vahid Bazargan,
B. Stoeber
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.64
Subject(s) - polydimethylsiloxane , permeation , membrane , materials science , real gas , partial pressure , analytical chemistry (journal) , flow (mathematics) , pressure measurement , chemical engineering , process engineering , chemistry , thermodynamics , mechanics , chromatography , oxygen , nanotechnology , engineering , organic chemistry , physics , biochemistry
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