Open AccessA MEMS OPTICAL MOIRÉ SHEAR STRESS SENSOR FOR HARSH ENVIRONMENT APPLICATIONS
Author(s) -
David Mills,
T.-A. Chen,
Mark Sheplak
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.63
Subject(s) - microelectromechanical systems , materials science , moiré pattern , shear stress , stress (linguistics) , shear (geology) , optoelectronics , electronic engineering , optics , engineering , composite material , physics , linguistics , philosophy