Open AccessA MEMS OPTICAL MOIRÉ SHEAR STRESS SENSOR FOR HARSH ENVIRONMENT APPLICATIONS
Author(s) -
David A. Mills,
T.-A. Chen,
Mark Sheplak
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.63
Subject(s) - materials science , microelectromechanical systems , fabrication , optical fiber , interferometry , moiré pattern , optoelectronics , shear (geology) , shear stress , stress (linguistics) , fiber optic sensor , opacity , optics , acoustics , composite material , fiber , linguistics , philosophy , physics , medicine , alternative medicine , pathology
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