Open AccessLOW VOLTAGE PIEZOELECTRIC NEMS RELAYS FOR ULTRALOW POWER DIGITAL CIRCUITS
Author(s) -
Usama Zaghloul,
Gleyson Luiz Piazza
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.38
Subject(s) - materials science , unimorph , optoelectronics , piezoelectricity , nanoelectromechanical systems , voltage , energy harvesting , actuator , low voltage , dissipation , electrical engineering , electronic circuit , volt , nitride , power (physics) , layer (electronics) , composite material , nanotechnology , engineering , nanomedicine , physics , quantum mechanics , nanoparticle , thermodynamics
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