Open AccessFUSED SILICA MICRO BIRDBATH SHELL RESONATORS WITH 1.2 MILLION Q AND 43 SECOND DECAY TIME CONSTANT
Author(s) -
J. Cho,
Tal Nagourney,
Ali Darvishian,
Behrouz Shiari,
Jong-Kwan Woo,
K. Najafi
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.28
Subject(s) - resonator , constant (computer programming) , time constant , materials science , shell (structure) , optoelectronics , physics , optics , composite material , computer science , electrical engineering , engineering , programming language