FUSED SILICA MICRO BIRDBATH SHELL RESONATORS WITH 1.2 MILLION Q AND 43 SECOND DECAY TIME CONSTANT
Author(s) -
J. Cho,
Tal Nagourney,
Ali Darvishian,
Behrouz Shiari,
J.-K. Woo,
K. Najafi
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.28
Subject(s) - resonator , radius , q factor , shell (structure) , time constant , materials science , constant (computer programming) , volume (thermodynamics) , range (aeronautics) , symmetry (geometry) , physics , optics , optoelectronics , electrical engineering , composite material , geometry , engineering , computer science , programming language , computer security , mathematics , quantum mechanics
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