Open AccessHIGH-GRADIENT MEMS ELECTROMAGNETS FOR PARTICLE BEAM MANIPULATION
Author(s) -
J. Harrison,
J. Wu,
Omeed Paydar,
Yongha Hwang,
E. Threlkeld,
James Rosenzweig,
P. Musumeci,
Rob N. Candler
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.16
Subject(s) - electromagnet , microelectromechanical systems , beam (structure) , particle (ecology) , materials science , physics , computer science , mechanical engineering , engineering , optics , optoelectronics , magnet , oceanography , geology