Open AccessREDUCTION OF ABLATION PLUME SHADING EFFECT FOR ULTRASHORT PULSED LASER MICROMACHINING OF SILICON
Author(s) -
Daniel Blood,
Mark Sheplak,
Thomas Schmitz
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.123
Subject(s) - surface micromachining , silicon , materials science , laser ablation , reduction (mathematics) , ablation , plume , laser , x ray laser , optoelectronics , optics , laser power scaling , engineering , physics , fabrication , medicine , alternative medicine , pathology , thermodynamics , aerospace engineering , geometry , mathematics