Open AccessREDUCTION OF ABLATION PLUME SHADING EFFECT FOR ULTRASHORT PULSED LASER MICROMACHINING OF SILICON
Author(s) -
Daniel Blood,
Mark Sheplak,
Tony L. Schmitz
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.123
Subject(s) - surface micromachining , materials science , machining , laser , silicon , ablation , laser ablation , surface roughness , laser beam machining , ultrashort pulse laser , x ray laser , surface finish , optics , ultrashort pulse , optoelectronics , composite material , metallurgy , laser beams , laser power scaling , fabrication , engineering , medicine , alternative medicine , physics , pathology , aerospace engineering
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