Open AccessPOORER Q GIVES BETTER MASS SENSITIVITY: RECONSIDERING DYNAMIC RANGE IN OPTOMECHANICALLY TRANSDUCED NEMS DEVICES
Author(s) -
Wayne K. Hiebert,
Saumya Roy,
Vincent T. K. Sauer
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.113
Subject(s) - nanoelectromechanical systems , sensitivity (control systems) , optomechanics , physics , optoelectronics , range (aeronautics) , electronic engineering , resonator , quantum mechanics , engineering , aerospace engineering , nanomedicine , nanoparticle