Open AccessULTRA-HIGH ASPECT-RATIO PDMS MICROPILLARS WITH SELF-ALIGNED MICROSPHERES FOR AIR-FLOW SENSING
Author(s) -
Jeongyeup Paek,
J. Kim
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.106
Subject(s) - microsphere , materials science , aspect ratio (aeronautics) , flow (mathematics) , nanotechnology , optoelectronics , chemical engineering , engineering , mechanics , physics