Open AccessULTRA-HIGH ASPECT-RATIO PDMS MICROPILLARS WITH SELF-ALIGNED MICROSPHERES FOR AIR-FLOW SENSING
Author(s) -
Jeongyeup Paek,
J. Kim
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.106
Subject(s) - materials science , microsphere , nanotechnology , aspect ratio (aeronautics) , microfluidics , optoelectronics , chemical engineering , engineering
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