Open AccessNOVEL TOUCH-FREE DRIVE, SENSE, AND TUNING MECHANISM FOR ALL-DIELECTRIC MICRO-SHELL GYROSCOPE
Author(s) -
Raviv Perahia,
Hung D. Nguyen,
Lizhen Huang,
Tracy J. Boden,
Jonathan Lake,
D. J. Kirby,
R. Joyce,
Logan Sorenson,
D.T. Chang
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.103
Subject(s) - gyroscope , electrical conductor , materials science , dielectric , shell (structure) , vibrating structure gyroscope , electrode , sense (electronics) , vibration , mechanism (biology) , electric field , optoelectronics , acoustics , electrical engineering , microelectromechanical systems , physics , engineering , aerospace engineering , composite material , quantum mechanics
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