Open AccessNOVEL TOUCH-FREE DRIVE, SENSE, AND TUNING MECHANISM FOR ALL-DIELECTRIC MICRO-SHELL GYROSCOPE
Author(s) -
R. Perahia,
Hung D. Nguyen,
Lizhen Huang,
Tracy J. Boden,
Jonathan James Lake,
D. J. Kirby,
R. Joyce,
Logan Sorenson,
D.T. Chang
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.103
Subject(s) - gyroscope , mechanism (biology) , sense (electronics) , dielectric , shell (structure) , vibrating structure gyroscope , computer science , materials science , optoelectronics , physics , engineering , electrical engineering , mechanical engineering , aerospace engineering , quantum mechanics