Open Access
MICROMACHINED BROADSIDE-COUPLED TUNABLE METAMATERIALS
Author(s) -
Xiaolei Zhao,
Kebin Fan,
J. Zhang,
George R. Keiser,
Hüseyin R. Seren,
Richard Averitt,
X. Zhang
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.101
Subject(s) - broadside , metamaterial , materials science , surface micromachining , optoelectronics , computer science , optics , physics , fabrication , medicine , alternative medicine , pathology