Open AccessIMAGE VALIDATION OF PARALLEL SCANNING TUNNELING MICROSCOPY WITH A CMOS MEMS PROBE ARRAY
Author(s) -
Y. Zhang,
Yefeng Tang,
L.R. Carley,
Gary K. Fedder
Publication year - 2014
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.10
Subject(s) - microelectromechanical systems , cmos , materials science , scanning tunneling microscope , chip , grating , optoelectronics , scanning probe microscopy , calibration , nanolithography , sensor array , microscopy , image sensor , optics , computer science , nanotechnology , electrical engineering , physics , engineering , medicine , alternative medicine , pathology , quantum mechanics , fabrication , machine learning
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