Open AccessIMAGE VALIDATION OF PARALLEL SCANNING TUNNELING MICROSCOPY WITH A CMOS MEMS PROBE ARRAY
Author(s) -
Y. Zhang,
Yefeng Tang,
L.R. Carley,
G.K. Fedder
Publication year - 2014
Publication title -
2014 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2014.10
Subject(s) - scanning tunneling microscope , microelectromechanical systems , cmos , optoelectronics , microscopy , materials science , scanning probe microscopy , image sensor , scanning ion conductance microscopy , computer science , nanotechnology , optics , scanning confocal electron microscopy , artificial intelligence , physics