Open AccessZERO BIAS OPERATION OF THERMAL-PIEZORESISTIVE MICROMECHANICAL RESONATORS VIA INTERNAL ELECTROMECHANICAL MIXING
Author(s) -
Amir Rahafrooz,
Siavash Pourkamali
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.99
Subject(s) - piezoresistive effect , resonator , biasing , materials science , optoelectronics , dc bias , signal (programming language) , mixing (physics) , thermal , silicon , voltage , microelectromechanical systems , electrical engineering , acoustics , engineering , computer science , physics , quantum mechanics , meteorology , programming language
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