Open AccessZERO BIAS OPERATION OF THERMAL-PIEZORESISTIVE MICROMECHANICAL RESONATORS VIA INTERNAL ELECTROMECHANICAL MIXING
Author(s) -
Amir Rahafrooz,
Siavash Pourkamali
Publication year - 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.99
Subject(s) - piezoresistive effect , mixing (physics) , resonator , materials science , thermal , optoelectronics , physics , quantum mechanics , meteorology