Open AccessTEMPERATURE-COMPENSATED EXTENSIONAL-MODE MEMS RESONATORS ON HIGHLY N-TYPE DOPED SILICON SUBSTRATES
Author(s) -
Brandon P. Harrington,
Mohsen Shahmohammadi,
J. Gonzales,
Reza Abdolvand
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.98
Subject(s) - resonator , materials science , silicon , silicon on insulator , doping , microelectromechanical systems , crystalline silicon , optoelectronics , atmospheric temperature range , piezoelectricity , composite material , physics , meteorology
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