Open AccessTEMPERATURE-COMPENSATED EXTENSIONAL-MODE MEMS RESONATORS ON HIGHLY N-TYPE DOPED SILICON SUBSTRATES
Author(s) -
Brandon P. Harrington,
Mohsen Shahmohammadi,
Jonathan Gonzales,
Reza Abdolvand
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.98
Subject(s) - microelectromechanical systems , silicon , resonator , materials science , extensional definition , mode (computer interface) , doping , optoelectronics , computer science , geology , paleontology , tectonics , operating system